Abstract: In order to characterize solar cell modules, patterning a sub-module into small-sized devices by photolithography are required. For CIGSSe sub-modules fabricated by ...

Abstract: Photolithography process is one of the most critical in the semiconductor industry since it drives the Moore’s law and the advances in microelectronics in general. Hard constraints on ...

The Institute of Optics and Electronics under the Chinese Academy of Sciences announced on Thursday that it has developed its own photolithography machine. [Photo/IC] "Make it small" has been the ...

Photolithography at a wavelength of 193 nm in the deep UV with water immersion lenses can now produce microelectronics containing features with a half-pitch as small ...